
VLSI Electronics
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Content
- Front Cover
- VLSI Electronics Microstructure Science
- Copyright Page
- Table of Contents
- List of Contributors
- Preface
- Contents of Other Volumes
- Chapter 1. Dry Processing for Fabrication of VLSI Devices
- I. INTRODUCTION
- II. OUTLINE OF DRY ETCHING TECHNIQUES AND EQUIPMENT
- III. SPECIFIC MATERIALS
- IV. SUMMARY
- REFERENCES
- Chapter 2. Materials Characterization for VLSI
- I. INTRODUCTION
- II. CHEMICAL ANALYSIS
- III. IMAGING
- IV. PHYSICAL DEFECT CHARACTERIZATION
- V. ELECTRICAL/FUNCTIONAL PROPERTIES
- VI. VLSI CHARACTERIZATION TECHNOLOGY NEEDS
- ACKNOWLEDGMENT
- REFERENCES
- Chapter 3. Physics and Modeling of Submicron Insulated-Gate Field-Effect Transistors. II
- I. INTRODUCTION
- II. REVIEW OF SCATTERING MECHANISMS
- III. THE SILICON SURFACE SYSTEM
- IV. GENERAL CONCLUSIONS
- REFERENCES
- Chapter 4. Impact of Submicron Technologyon Microwave and Millimeter-Wave Devices
- I. INTRODUCTION
- II. CHARGE TRANSPORT IN SEMICONDUCTORS
- III. TRANSISTOR STRUCTURES
- IV. TWO-TERMINAL DEVICES
- V. MICROWAVE DEVICES MADE POSSIBLE BY SUBMICRON TECHNOLOGY
- VI. DISCUSSION AND CONCLUSIONS
- REFERENCES
- Chapter 5. Microfabrication and Basic Research
- I. INTRODUCTION
- II. HISTORICAL PERSPECTIVE
- III. MICROFABRICATION AND BASIC RESEARCH TODAY
- IV. FUTURE DIRECTIONS OF BASIC RESEARCH
- REFERENCES
- Chapter 6. Impact of VLSI on Medicine
- I. INTRODUCTION
- II. HEALTH CARE DELIVERY SYSTEMS
- III. COMPUTERIZED SCANNING AND NUCLEAR X-RAY TECHNIQUES
- IV. PROSTHETIC AND ORTHOTIC DEVICES
- V. THE HEMODIALYZER: THE ARTIFICIAL KIDNEY
- VI. COMPUTER-BASED BIOFEEDBACK SYSTEMS
- REFERENCES
- Chapter 7. Signal Processing Using MOS-VLSI Technology
- I. INTRODUCTION
- II. SURVEY OF SIGNAL PROCESSING ICs
- III. SCALING
- IV. IMPLICATIONS OF SCALING
- V. ANALOG SIGNAL PROCESSING
- VI. CONCLUSIONS
- REFERENCES
- Chapter 8. The Impact of VLSI on Military Systems: A Supplier's Viewpoint
- I. INTRODUCTION-STANDING AT THE THRESHOLD
- II. THE DOD'S NEEDS: ELECTRONIC ISSUES
- III. VHSIC-ROADMAP FOR SUCCESS
- IV. THE VLSI ENVIRONMENT
- ACKNOWLEDGMENT
- Chapter 9. The Impact of VLSI on the Automobile of Tomorrow
- I. INTRODUCTION
- II. HISTORICAL REVIEW OF AUTOMOTIVE ELECTRONICS
- III. PROBLEMS FACING AUTOMOTIVE ELECTRONICS
- IV. The Potential Impact of VLSI on the Automobile
- V. RUTS IN THE ROAD TO VLSI
- REFERENCE
- Chapter 10. Very Large Scale Protection for VLSI?
- I. A LOOK AT PATENTS-PAST AND PRESENT
- II. PATENTS-LICENSING AND LITIGATION
- III. COSTS OF OBTAINING PATENTS AND PATENT ACQUISITION STRATEGIES
- IV. PATENTS AS A STIMULUS TO RESEARCH AND INVENTION
- V. PATENTS AND THE SEMICONDUCTOR INDUSTRY-VLSI
- VI. PROTECTION FOR VLSI TECHNOLOGY
- VII. VLSI PATENTS
- VIII. VLSI COPYRIGHTS
- IX. VLSI TRADE SECRET PROTECTION
- X. THE LAW OF UNFAIR COMPETITION
- XI. CONCLUSION, SUMMARY, AND GUIDELINES FOR THE FUTURE
- REFERENCES
- Index
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