Introduction to Microelectromechanical Microwave Systems, Second Edition
1st Edition
Published on 1. January 2003
277 pages
978-1-58053-872-5 (ISBN)
Description
Microelectromechanical microwave systems are the product of integrated circuit technology, mechanical engineering, materials science, and microwave communications. This completely updated, second edition of an Artech House bestseller brings together all the principles, techniques, methods, and theories from these different fields to provide you with a full, all-encompassing introduction to microelectromechanical microwave systems.
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Hector De Los Santos
Introduction to Microelectromechanical Microwave Systems, Second Edition
Book
10/2004
Artech House Publishers
€104.32
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Content
- Introduction to Microelectromechanical Microwave Systems
- Contents
- Preface xi
- Acknowledgments xxi
- 1 Microelectromechanical Systems 1
- 1.1 MEMS Origins 1
- 1.2 MEMS Impetus/Motivation 3
- 1.3 MEMS Fabrication Technologies 3
- 1.3.1 Conventional IC Fabrication Process 4
- 1.3.2 Bulk Micromachining 5
- 1.3.3 Surface Micromachining 6
- 1.3.4 Fusion Bonding 12
- 1.3.5 LIGA and Sacrificial LIGA 14
- 1.3.6 Hybrid Micromachining Processes 14
- 1.4 Exercises 18
- 1.5 Summary 21
- 2 Fundamental MEMS Device Physics 25
- 2.1 Actuation 25
- 2.1.1 Electrostatic Actuation 26
- 2.1.2 Piezoelectric Actuation 35
- 2.1.3 Thermal Actuation 36
- 2.1.4 Magnetic Actuation 39
- 2.2 Mechanical Vibrations 40
- 2.2.1 The Single-Degree-of-Freedom-System 41
- 2.2.2 The Many-Degrees-of-Freedom System 42
- 2.2.3 RayleighTs Method 43
- 2.3 Computer-Aided Design of MEMS 46
- 2.3.1 MEMS Materials and Fabrication Process Modeling 47
- 2.3.2 Solid Modeling 47
- 2.3.3 Numerical Simulation of MEMS 47
- 2.4 Exercises 51
- 2.5 Summary 53
- References 55
- 3 Fundamental MEMS Devices: The MEM Switch 59
- 3.1 Introduction 59
- 3.2 The Cantilever Beam MEM Switch 59
- 3.3 MEM Switch Design Considerations 61
- 3.3.1 Switch Specifications 61
- 3.3.2 Microwave Considerations 66
- 3.3.3 Material Considerations 70
- 3.3.4 Mechanical Considerations 76
- 3.4 Summary 83
- References 84
- 4 Fundamental MEMS Devices: The MEM Resonator 87
- 4.1 Introduction 87
- 4.2 The Cantilever Beam MEM Resonator 87
- 4.3 MEM Resonator Design Considerations 89
- 4.3.1 Resonator Specifications 89
- 4.3.2 Microwave Considerations 89
- 4.3.3 Micromechanical Resonator Limitations 106
- 4.3.4 Film Bulk Acoustic Wave Resonators 110
- 4.4 Exercises 115
- 4.5 Summary 117
- References 118
- 5 Microwave MEMS Applications 121
- 5.1 Introduction 121
- 5.2 MEM Switches 122
- 5.2.1 Coplanar Cantilever Beam MEM Switch Performance Analysis 122
- 5.2.2 Electrostatic Series Cantilever Beam MEM Switch 123
- 5.2.3 Electrostatic Shunt Cantilever Beam MEM Switch 127
- 5.2.4 Thermal-Electrostatic MEM Switch 132
- 5.2.5 Magnetic MEM Switch 135
- 5.3 Micromachining-Enhanced Planar Microwave Passive Elements 138
- 5.3.1 Micromachined Transmission Lines 140
- 5.3.2 Micromachining-Enhanced Lumped Elements 152
- 5.4 Summary 168
- References 168
- 6 MEMS-Based Microwave Circuits and Systems 173
- 6.1 Introduction 173
- 6.2 Wireless Communications Systems 175
- 6.2.1 Fundamentals of Wireless Communications 175
- 6.2.2 Fundamentals of Satellite Communications 180
- 6.3 MEMS-Based RF and Microwave Circuits 183
- 6.3.1 Phase Shifters 183
- 6.3.2 Resonators 184
- 6.3.3 Filters 186
- 6.3.4 Oscillators 199
- 6.3.5 Packaging 202
- 6.4 Summary 204
- References 205
- Glossary 209
- About the Author 211
- Index 213
