Semiconductor Manufacturing Technology
Will be published approx. on 4. March 2008
Book
Hardback
484 pages
978-981-256-823-6 (ISBN)
Description
This textbook contains all the materials that an engineer needs to know to start a career in the semiconductor industry. It also provides readers with essential background information for semiconductor research. It is written by a professional who has been working in the field for over two decades and teaching the material to university students for the past 15 years. It includes process knowledge from raw material preparation to the passivation of chips in a modular format.
More details
Series
Language
English
Place of publication
Singapore
Singapore
Target group
College/higher education
Senior undergraduate and graduate students as well as researchers and engineers in semiconductor industries.
Product notice
sewn/stitched
Paper over boards
Dimensions
Height: 234 mm
Width: 157 mm
Thickness: 30 mm
Weight
816 gr
ISBN-13
978-981-256-823-6 (9789812568236)
Copyright in bibliographic data and cover images is held by Nielsen Book Services Limited or by the publishers or by their respective licensors: all rights reserved.
Schweitzer Classification
Person
Content
Building Blocks for Integrated Circuits; Thermal Oxidation; Gas Kinetics and Plasma Physics; Chemical Vapor Deposition; Plasma-enhanced Chemical Vapor Deposition and Etching; Pattern Transfer: Photolithography; Pattern Generation: Photomask Processing; Doping Technology; Metallization and Silicidation; Planarization and CMP Technology; Copper and Low k.