In situ Scanning Electron Microscopy in Materials Research

The authors give an instructive survey of the advancements in Scanning Electron Microscopy (SEM) since there has been a new stage in the development of scanning electron microscopes, as they are equipped with special devices for in situ investigations. Thus a "microlab" now exists inside the electron microscope. Different in situ sample treatments, based on mechanical, thermal and electrical effects, as well as on surface modification by radiation and environmental interaction processes, can be used to quantitatively study reactions at solid surfaces under well-defined external conditions. The objects under investigation can be of many kinds: engineering materials; electrical and magnetic materials (as used in microelectronics); products of technical and chemical industries; minerals; forensic objects; textiles; pharmaceutical; biological and archaeological specimens.