Optical Characterization of Real Surfaces and Films: Volume 19
Advances in Research and Development
Published on 17. January 1995
Book
Hardback
328 pages
978-0-12-533019-0 (ISBN)
Description
This new volume of the highly respected Physics of Thin Films Serial discusses inhomogeneity in real films and surfaces. The volume, guest-edited by K. Vedam, follows the growth of thin films both from the surface of the substrate, and from the atomic level, layer by layer. The text features coverage of Real-Time Spectroscopic Ellipsometry (RTSE) and Reflectance Anisotropy (RA), two major breakthrough optical techniques used to characterize real time and insitu films and surfaces. In six insightful chapters, the contributors assess the impact of these techniques, their strengths and limitations, and their potential for further development.
More details
Language
English
Place of publication
San Diego
United States
Publishing group
Elsevier Science Publishing Co Inc
Target group
Professional and scholarly
Libraries, researchers in electrical engineering, condensed matter physics, and materials science departments. All academic and industrial thin film researchers.
Dimensions
Height: 229 mm
Width: 152 mm
Weight
620 gr
ISBN-13
978-0-12-533019-0 (9780125330190)
Copyright in bibliographic data is held by Nielsen Book Services Limited or its licensors: all rights reserved.
Schweitzer Classification
Other editions
Additional editions
E-Book
10/2013
Academic Press
€54.95
Available for download
Persons
Content
B. Drevillon and V. Yakovlev, In Situ Studies of Crystalline Semiconductor Surfaces by Reflectance Anisotropy. R.W. Collins, I. An, H.V. Nguyen, Y. Li, and Y. Lu, Real-Time Spectroscopic Ellipsometry Studies of theNucleation, Growth, and Optical Functions of Thin Films, Part I: Tetrahedrally-Bonded Materials. H.V. Nguyen, I. An, and R. Collins, Real-Time Spectroscopic Ellipsometry Studies of the Nucleation, Growth, and Optical Functions of Thin Films, Part II: Aluminum. P. Chindaudom and K. Vedam, Optical Characterization of Inhomogeneous Transparent Films on Transparent Substrates by Spectroscopic Ellipsometry. S. Trolier-McKinstry, P. Chindaudom, K. Vedam, and R.E. Newnham, Characterization of Ferroelectric Films by Spectroscopic Ellipsometry. A.N. Parikh and D. Allara, Effects of Optical Anisotropy on Spectro-Ellipsometric Data for Thin Films and Surfaces. Chapter References. Author Index. Subject Index.