A User's Guide to Ellipsometry
Will be published approx. on 24. November 2006
Book
Paperback/Softback
272 pages
978-0-486-45028-5 (ISBN)
Description
Text for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. 1993 edition.
More details
Series
Language
English
Place of publication
New York
United States
Product notice
Paperback (trade)
Unsewn / adhesive bound
Dimensions
Height: 216 mm
Width: 143 mm
Thickness: 14 mm
Weight
299 gr
ISBN-13
978-0-486-45028-5 (9780486450285)
Copyright in bibliographic data and cover images is held by Nielsen Book Services Limited or by the publishers or by their respective licensors: all rights reserved.
Schweitzer Classification
Persons
Author Harland G. Tompkins is a Mesa, Arizona-based scientist associated with Motorola, Inc.
Content
1. Theoretical Aspects
2. Instrumentation
3. Using Optical Parameters to Determine Material Properties
4. Determining Optical Parameters for Inaccessible Substrates and Unknown Films
5. Extremely Thin Films
6. The Special Case of Polysilicon
7. The Effect of Roughness
Case Studies
Case 1. Dissolution and Swelling of Thin Polymer Films
Case 2. Ion Beam Interaction with Silicon
Case 3. Dry Oxidation of Metals
Case 4. Optical Properties of Sputtered Chromium Suboxide Thin Films
Case 5. Ion-assisted Film Growth of Zirconium Dioxide
Case 6. Electrochemical/Ellipsometric Studies of Oxides on Metals
Case 7. Amorphous Hydrogenated Carbon Films
Case 8. Fluoropolymer Films on Silicon from Reactive Ion Etching
Case 9. Various Films on InP
Case 10. Benzotriazole and Benzimidazole on Copper
Case 11. Gas Adsorption on Metal Surfaces
Case 12. Silicon-Germanium Thin Films
Case 13. Profiling of HgCdTe
Case 14. Oxides and Nitrides of Silicon
Appendices