Spectroscopic Ellipsometry and Reflectometry
A User's Guide
Published on 6. April 1999
Book
Hardback
XVIII, 230 pages
978-0-471-18172-9 (ISBN)
Description
While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.
More details
Product info
gebunden
Edition
1. Auflage
Language
English
Place of publication
United States
Publishing group
John Wiley & Sons Inc
Target group
College/higher education
Professional and scholarly
Product notice
sewn/stitched
Cloth over boards
Dimensions
Height: 240 mm
Width: 161 mm
Thickness: 18 mm
Weight
542 gr
ISBN-13
978-0-471-18172-9 (9780471181729)
Schweitzer Classification
Persons
Harland Tompkins retired from full-time employment in 2001. During his full-time employment, he was employed by General Electric Co., Bell Laboratories, the Idaho National Engineering Lab, and Motorola.
William A. McGahan is the author of Spectroscopic Ellipsometry and Reflectometry: A User's Guide, published by Wiley.
William A. McGahan is the author of Spectroscopic Ellipsometry and Reflectometry: A User's Guide, published by Wiley.
Content
Perspective and History.
Fundamentals.
Optical Properties of Materials and Layered Structures.
Instrumentation.
The Anatomy of a Reflectance Spectrum.
Aspects of Single-Wavelength Ellipsometry.
The Anatomy of an Ellipsometric Spectrum.
Analytical Methods and Approach.
Optical Data Analysis.
Quality Assurance.
Very Thin Films.
Roughness.
Appendices.
Index.