Process and Materials Characterization and Diagnostics in IC Manufacturing
II (Proceedings of SPIE)
Published on 18. September 2003
Book
Paperback/Softback
222 pages
978-0-8194-4846-0 (ISBN)
More details
Language
English
Place of publication
Bellingham
United States
Target group
College/higher education
Professional and scholarly
ISBN-13
978-0-8194-4846-0 (9780819448460)
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Schweitzer Classification