Semiconductor Sensors
Published on 8. November 1994
Book
Hardback
576 pages
978-0-471-54609-2 (ISBN)
Description
An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends.
More details
Product info
gebunden
Edition
1. Auflage
Language
English
Place of publication
United States
Publishing group
John Wiley & Sons Inc
Target group
College/higher education
Professional and scholarly
Product notice
sewn/stitched
Cloth over boards
Dimensions
Height: 240 mm
Width: 161 mm
Thickness: 35 mm
Weight
1012 gr
ISBN-13
978-0-471-54609-2 (9780471546092)
Schweitzer Classification
Person
S. M. SZE, PhD, is UMC Chair Professor in the Electronics Engineering Department at the National Chiao Tung University. His previous books include Semiconductor Devices; Physics of Semiconductor Devices, Second Edition; High-Speed Semiconductor Devices; and Semiconductor Sensors, all available from Wiley.
Content
Classification and Terminology of Sensors (S. Sze).
Semiconductor Sensor Technologies (C. Mastrangelo & W. Tang).
Acoustic Sensors (M. Motamedi & R. White).
Mechanical Sensors (B. Kloeck & N. de Rooij).
Magnetic Sensors (H. Baltes & R. Castagnetti).
Radiation Sensors (S. Audet & J. Steigerwald).
Thermal Sensors (S. Van Herwaarden & G. Meijer).
Chemical Sensors (S. Morrison).
Biosensors (A. Dewa & W. Ko).
Integrated Sensors (K. Najafi, et al.).
Appendices.
Index.