The Science and Technology of Plasma and Vacuum Processing

This book presents the fundamental principles of vacuum technology. It introduces the working principles and operating regimes of different vacuum pumps and vacuum sensors and discusses vacuum systems design concepts and trouble-shooting of vacuum problems. Demonstrating the wide range of vacuum application throughout industry, the authors present an overview that familiarizes students with the various parts of a vacuum system and prepares them for specifying and sourcing vacuum systems components and materials.