Strain-Induced Effects in Advanced MOSFETs

1 Introduction 2 Scaling, Power Consumption, and Mobility Enhancement Techniques 3 Strain and Stress 4 Basic Properties of the Silicon Lattice 5 Band Structure of Relaxed Silicon 6 Perturbative Methods for Band Structure Calculations in Silicon 7 Strain Effects on the Silicon Crystal Structure 8 Strain Effects on the Silicon Band Structure 9 Strain Effects on the Conduction Band of Silicon 10 Electron Subbands in Silicon in the Effective Mass Approximation 11 Electron Subbands in Thin Silicon Films 12 Demands of Transport Modeling in Advanced MOSFETs