Computational Semiconductor Processing
Lithography for an IC DFM
1st Edition
Will be published approx. on 31. December 2050
Book
Hardback
525 pages
978-1-4200-6822-1 (ISBN)
More details
Series
Language
English
Place of publication
Bosa Roca
United States
Publishing group
Taylor & Francis Inc
Target group
Professional and scholarly
Product notice
Paper over boards
Illustrations
500 s/w Abbildungen
500 Illustrations, black and white
Dimensions
Height: 234 mm
Width: 156 mm
ISBN-13
978-1-4200-6822-1 (9781420068221)
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Schweitzer Classification