Metrology, Inspection, and Process Control for Microlithography XXXI
Published on 30. September 2017
Book
Paperback/Softback
902 pages
978-1-5106-0741-5 (ISBN)
Description
Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
More details
Series
Language
English
Place of publication
Bellingham
United States
Target group
Professional and scholarly
Dimensions
Height: 279 mm
Width: 216 mm
ISBN-13
978-1-5106-0741-5 (9781510607415)
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Schweitzer Classification