Simulation of Semiconductor Devices and Processes

Numerical Modelling and Materials Characterisation for Integrated Micro Electro Mechanical Systems.- Fast and Accurate Aerial Imaging Simulation for Layout Printability Optimization.- Efficient and Rigorous 3D Model for Optical Lithography Simulation.- Application of the Two-dimensional Numerical Simulation for the Description of Semiconductor Gas Sensors.- Analysis of Piezoresistive Effects in Silicon Structures Using Multidimensional Process and Device Simulation.- Modeling of Magnetic-Field-Sensitive GaAs Devices Using 3D Monte Carlo Simulation.- Quasi Three-Dimensional Simulation of Heat Transport in Thermal-Based Microsensors.- Simulating Deep Sub-Micron Technologies: An Industrial Perspective.- An Improved Calibration Methodology for Modeling Advanced Isolation Technologies.- Algorithms for the Reduction of Surface Evolution Discretization Error.- Polygonal Geometry Reconstruction after Cellular Etching or Deposition Simulation.- A Data-Model for a Technology and Simulation Archive.- A Programmable Tool for Interactive Wafer-State Level Data Processing.- Layout Design Rule Generation with TCAD Tools for Manufacturing.- ALAMODE: A Layered Model Development Environment.- TCAD Optimization Based on Task-Level Framework Services.- Cellular Automata Simulation of GaAs-IMPATT-Diodes.- Two-Dimensional Simulation of Deep-Trap Effects in GaAs MESFETs with Different Types of Surface States.- An Efficient Numerical Method to Solve the Time-Dependent Semiconductor Equations Including Trapped Charge.- Advances in Numerical Methods for Convective Hydrodynamic Model of Semiconductor Devices.- An Advanced Cellular Automaton Method with Interpolated Flux Scheme and its Application to Modeling of Gate Currents in Si MOSFETs.- Piezoresistance and the Drift-Diffusion Model in Strained Silicon.- A Novel Approach to HF-Noise Characterization of Heterojunction Bipolar Transistors.- Ge Profile for Minimum Neutral Base Transit Time in Si/Si1-yGey Heteroj unction Bipolar Transistors.- Performance Optimization in Si/SiGe Heterostructure FETs.- On the Integral Representations of Electrical Characteristics in Si Devices.- Large Signal Frequency Domain Device Analysis Via the Harmonic Balance Technique.- A Method for Extracting the Threshold Voltage of MOSFETs Based on Current Components.- 2-D MOSFET Simulation by Self-Consistent Solution of the Boltzmann and Poisson Equations Using a Generalized Spherical Harmonic Expansion.- Ultra High Performance, Low Power 0.2 µm CMOS Microprocessor Technology and TCAD Requirements.- Viscoelastic Modeling of Titanium Silicidation.- Multidimensional Nonlinear Viscoelastic Oxidation Modeling.- Three-Dimensional Integrated Process Simulator: 3D-MIPS.- Effect of Process-Induced Mechanical Stress on Circuit Layout.- The Simulation System for Three-Dimensional Capacitance and Current Density Calculation with a User Friendly GUI.- Numerical and Analytical Modelling of Head Resistances of Diffused Resistors.- New Spreading Resistance Effect for Sub-0.50µm MOSFETs: Model and Simulation.- The Role of SEMATECH in Enabling Global TCAD Collaboration.- Three Dimensional Simulation for Sputter Deposition Equipment and Processes.- Comprehensive Reactor, Plasma, and Profile Simulator for Plasma Etch Processes.- Modeling the Wafer Temperature in a LPCVD Furnace.- Determination of Electronic States in Low Dimensional Heterostructure and Quantum Wire Devices.- An Exponentially Fitted Finite Element Scheme for Diffusion Process Simulation on Coarse Grids.- Achievement of Quantitatively Accurate Simulation of Ion-Irradiated Bipolar PowerDevices.- Modeling of Substrate Bias Effect in Bulk and SOI SiGe-channel p-MOSFETs.- A Very Fast Three-Dimensional Impurity Profile Simulation Incorporating An Accumulated Diffusion Lenght and its Application to the Design of Power MOSFETs.- Recovery of Vectorial Fields and Currents in Multidimensional Simulation.- An Efficient Approach to Solving The Boltzmann Transport Equation in Ultra-fast Transient Situations.- Modeling of a Hot Electron Injection Laser.- Scaling Considerations of Bipolar Transistors Using 3D Device Simulation.- Three-Dimensional Monte Carlo Simulation of Boron Implantation into Single-Crystal Silicon Considering Mask Structure.- A fully 2D, Analytical Model for the Geometry and Voltage Dependence of Threshold Voltage in Submicron MOSFETs.- On the Influence of Band Structure and Scattering Rates on Hot Electron Modeling.- Finite Element Monte Carlo Simulation of Recess Gate FETs.- Coupled 2D-Microscopic/Macroscopic Simulation of Nanoelectronic Heterojunction Devices.- On the Discretization of van Roosbroeck's Equations with Magnetic Field.- Modeling of Impact Ionization in a Quasi Deterministic 3D Particle Dynamics Semiconductor Device Simulation Program.- Accurate Modeling of Ti/TiN Thin Film Sputter Deposition Processes.- Monte Carlo Simulation of InP/InGaAs HBT with a Buried Subcollector.- Design and Optimization of Millimeter-Wave IMPATT Oscillators Using a Consistent Model for Active and Passive Circuit Parts.- Generalised Drift-Diffusion Model of Bipolar Transport in Semiconductors.- Efficient 3D Unstructured Grid Algorithms for Modelling of Chemical Vapour Deposition in Horizontal Reactors.- Preventing Critical Conditions in IGBT Chopper Circuits by a Multi-Step Gate Drive Mode.- Control of Plasma Dynamics within Double-Gate-Turn-OffThyristors (D-GTO).- A Vector Level Control Function for Generalized Octree Mesh Generation.- Comparison of Hydrodynamic Formulations for Non-Parabolic Semiconductor Device Simulations.- Influence of Analytical MOSFET Model Quality on Analog Circuit Simulation.- 2-D Adaptive Simulation of Dopant Implantation and Diffusion.- Optimization of a Recessed LOCOS Using a Tuned 2-D Process Simulator.- Simulation of Complex Planar Edge Termination Structures for Vertical IGBTs by Solving the Complete Semiconductor Device Equations.- Numerical Analysis of Hot-Electron Effects in GaAs MESFETs.- Capacitance Model of Microwave InP-Based Double Heterojunction Bipolar Transistors.- Estimation of the Charge Collection for the Soft-Error Immunity by the 3D-Device Simulation and the Quantitative Investigation.- D. C. Electrothermal Hybrid BJT Model for SPICE.- Alpha-Particle Induced Soft Error Rate Evaluation Tool and User Interface.- Hydrodynamic Modeling of Electronic Noise by the Transfer Impedance Method.- Monte Carlo Simulation of S-Type Negative Differential Conductance in Semiconductor Heterostructures.- Two-Barrier Model for Description of Charge Carriers Transport Processes in Structures with Porous Silicon.- Monte-Carlo Simulation of Inverted Hot Carrier Distribution Under Strong Carrier-Optical Phonon Scattering.- Algorithms and Models for Simulation of MOCVD of III-V Layers in the Planetary Reactor.- An Approach for Explaining Drift Phenomena in GTO Devices Using Numerical Device Simulation.- Parallel 3D Finite Element Power Semiconductor Device Simulator Based on Topologically Rectangular Grid.- Investigation of Silicon Carbide Diode Structures via Numerical Simulations Including Anisotropic Effects.- A New Physical Compact Model of CLBTs for Circuit Simulation Including Two-Dimensional Calculations.- Combining 2D and 3D Device Simulation with Circuit Simulation for Optimising High Efficiency Silicon Solar Cells.- A New Quasi-two Dimensional HEMT Model.- Simulations of the Forward Behaviour of Hybrid Schottky-/pn-Diodes.- HFET Breakdown Study by 2D and Quasi 2D Simulations: Topology Influence.- Investigation of GTO Turn-on in an Inverter Circuit at Low Temperatures Using 2-D Electrothermal Simulation.- Large Scale Thermal Mixed Mode Device and Circuit Simulation.- Scaling of Conventional MOSFET's to the 0.1 µm Regime.- Monte Carlo Simulation of Carrier Capture at Deep Centers for Silicon and Gallium Arsenide Devices.- A New Statistical Enhancement Technique in Parallelized Monte Carlo Device Simulation.- Stability Issues in Self-Consistent Monte Carlo-Poisson Simulations.- The Path Integral Monte Carlo Method for Quantum Transport on a Parallel Computer.- A Monte Carlo Transport Model Based on Sperical Harmonics Expansion of the Valence Bands.- Full-Band Monte Carlo Transport Calculation in an Integrated Simulation Platform.- On Particle-Mesh Coupling in Monte Carlo Semiconductor Device Simulation.- T2CAD: Total Design for Sub-µm Process and Device Optimization with Technology-CAD.- Modelling Impact-Ionization in the Framework of the Spherical-Harmonics Expansion of the Boltzmann Transport Equation with Full-Band Structure Effects.- Impact Ionization Model Using Second- and Fourth-Order Moments of Distribution Functions.- An Accurate NMOS Mobility Model for 0.25µm MOSFETs.- A 2-D Modeling of Metal-Oxide-Polycrystalline Silicon-Silicon (MOPS) Structures for the Determination of Interface State and Grain Boundary State Distributions.- Sensitivity Analysis of an Industrial CMOS Process Using RSM Techniques.- Process- andDevicesimulation of Very High Speed Vertical MOS Transistors.- Two-Dimensional Transient Simulation of Charge-Coupled Devices Using MINIMOS NT.- Determination of Vacancy Diffusivity in Silicon for Process Simulation.- Precipitation Phenomena and Transient Diffusion/Activation During High Concentration Boron Annealing.- Modelling of Silicon Interstitial Surface Recombination Velocity at Non-Oxidizing Interfaces.- Efficient Hybrid Solution of Sparse Linear Systems.- Mesh Generation for 3D Process Simulation and the Moving Boundary Problem.- Three-Dimensional Grid Adaption Using a Mixed-Element Decomposition Method.- Unified Grid Generation and Adaptation for Device Simulation.- Platinum Diffusion at Low Temperatures.- Lattice Monte-Carlo Simulations of Vacancy-Mediated Diffusion and Implications for Continuum Models of Coupled Diffusion.- A New Hydrodynamic Equation for Ion-Implantation Simulation.- Monte Carlo Simulation of Multiple-Species Ion Implantation and its Application to the Modeling of 0.1µ PMOS Devices.- Analytical Model for Phosphorus Large Angle Tilted Implantation.- Statistical Accuracy and CPU Time Characteristic of Three Trajectory Split Methods for Monte Carlo Simulation of Ion Implantation.- Author Index.