Nanopositioning Technologies
Fundamentals and Applications
Published on 7. January 2016
Book
Hardback
VI, 409 pages
978-3-319-23852-4 (ISBN)
Description
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
More details
Edition
1st ed. 2016
Language
English
Place of publication
Cham
Switzerland
Publishing group
Springer International Publishing
Target group
Professional and scholarly
Research
Illustrations
76 s/w Abbildungen, 203 farbige Abbildungen
VI, 409 p. 279 illus., 203 illus. in color.
Dimensions
Height: 241 mm
Width: 160 mm
Thickness: 28 mm
Weight
787 gr
ISBN-13
978-3-319-23852-4 (9783319238524)
DOI
10.1007/978-3-319-23853-1
Schweitzer Classification
Other editions
Additional editions
Book
03/2018
Springer
€106.99
Shipment within 10-15 days
E-Book
12/2015
Springer
€96.29
Available for download
Content
1.A review of Stick-Slip Nanopositioning Actuators.- 2. Piezoelectric Motor Technology - A Review.- 3.Design of High-speed Nanopositioning Systems.- 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism.- 5.Electro-magnetic Nano Positioning.- 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis.- 7. Tracking Control for Nanopositioning.- 8.Position Sensors for Nanopositioning.- 9. MEMS Nanopositioners.- 10.Control Issues of MEMS nanopositioning devices.- 11. A Review of Nanomanipulation in Scanning Electron Microscopes.- 12. Nanopositioning for lithography and data storage.