
The Physical Basis of Ultrahigh Vacuum
American Institute of Physics (Publisher)
1st Edition
Published on 31. December 1992
Book
Paperback/Softback
XV, 498 pages
978-1-56396-122-9 (ISBN)
Description
Market: Those involved in the design and use of UHV component systems. Written 25 years ago, this book explains both the design and use of UHV systems and components, as well as the underlying physical principles on which the performance of the equipment depends. Because of its close association of these underlying physical principles with the practical problems inherent in UHV equipment, the book retains its value to this day.
More details
Series
Edition
1993
Language
English
Place of publication
NY
United States
Target group
College/higher education
Professional and scholarly
Research
Illustrations
XV, 498 p.
Dimensions
Height: 235 mm
Width: 155 mm
Thickness: 28 mm
Weight
779 gr
ISBN-13
978-1-56396-122-9 (9781563961229)
DOI
10.1007/b69620
Schweitzer Classification
Content
Contents: Molecule-Molecule and Molecule-Interactions. Collision Processes in Gases. Interaction of Charged Particles with Surfaces. Interaction of Radiation with Surfaces. Mechanical Properties of Materials at Very Low Pressures. General Considerations of Pressure Measurement. Total Pressure Gauges. Partial Pressure Gauges. Processing Techniques for Ultrahigh Vacuum. Pumps for Ultrahigh Vacuum. Examples of Ultrahigh Vacuum Systems.