Advanced Metallization for Ulsi Applications
Proceedings of the Conference Held October 8-10, 1991, Murray Hill, New Jersey and October 28-31, 1991, Tokyo, Japan
Published on 30. April 1992
Book
Hardback
577 pages
978-1-55899-152-1 (ISBN)
More details
Series
Language
English
Place of publication
United States
Target group
College/higher education
Professional and scholarly
ISBN-13
978-1-55899-152-1 (9781558991521)
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Schweitzer Classification