Modelling of Microfabrication Systems
Published on 8. December 2010
Book
Paperback/Softback
X, 270 pages
978-3-642-05536-2 (ISBN)
Description
This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
Reviews / Votes
From the reviews:
"This book is aimed at people working on simulation and optimization process fabrication of Microelectromechanical Systems (MEMS). . the book provides a fairly complete view of the modeling of microfabrication processes. . 'It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications'." (Grégory Guisbiers, Physicalia, Vol. 26 (1), 2004)
More details
Series
Edition
Softcover reprint of hardcover 1st ed. 2003
Language
English
Place of publication
Berlin
Germany
Publishing group
Springer Berlin
Target group
Professional and scholarly
Research
Illustrations
X, 270 p.
Dimensions
Height: 235 mm
Width: 155 mm
Thickness: 16 mm
Weight
429 gr
ISBN-13
978-3-642-05536-2 (9783642055362)
DOI
10.1007/978-3-662-08792-3
Schweitzer Classification
Other editions
Additional editions
Raja Nassar | Weizhong Dai
Modelling of Microfabrication Systems
Book
06/2003
Springer
€160.49
Shipment within 10-15 days
Content
1 Ion Beam.- 2 X-ray Lithography.- 3 Laser Chemical Vapor Deposition.- 4 Laser Photopolymerization.- 5 Laser Ablation.- 6 Thin Films.- References.