Silicides for VLSI Applications
Published on 23. June 1983
Book
Hardback
200 pages
978-0-12-511220-8 (ISBN)
Description
Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published papers. The reader may find it advantageous to refer to the references listed.
More details
Language
English
Place of publication
San Diego
United States
Publishing group
Elsevier Science Publishing Co Inc
Target group
Professional and scholarly
It is written for practicing device engineers, materials scientists, and newcomers, including students of microelectronics technology.
Dimensions
Height: 229 mm
Width: 152 mm
Weight
540 gr
ISBN-13
978-0-12-511220-8 (9780125112208)
Copyright in bibliographic data is held by Nielsen Book Services Limited or its licensors: all rights reserved.
Schweitzer Classification
Other editions
Additional editions
Shyam P. Murarka
Silicides for VLSI Applications
E-Book
05/2014
Academic Press
€54.95
Available for download
Person
Content
Preface. Acknowledgements. Introduction. Properties. Thermodynamic Considerations. Formation. Oxidation. Integrated-Circuit Fabrication. Special Applications. References. Author Index. Subject Index.