Metallization
Theory and Practice of VLSI and ULSI
Published on 1. December 1992
Book
Hardback
270 pages
978-0-7506-9001-0 (ISBN)
Description
This text collects all the metallization-related concepts and concerns from research papers, reviews and edited books in one volume with the microelectronic industry in mind.
More details
Language
English
Place of publication
Oxford
United Kingdom
Publishing group
Elsevier Science & Technology
Target group
College/higher education
Professional and scholarly
Dimensions
Height: 280 mm
Width: 250 mm
Weight
715 gr
ISBN-13
978-0-7506-9001-0 (9780750690010)
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Schweitzer Classification
Content
Review of properties; crystal structure and epitaxy; electrical properties; mechanical properties; diffusion and reactions in thin metallic film; selecting a deposition method; deposition techniques; pattern definition; a view of other useful characterization techniques; metals and alloys; thin films for multilevel on chip and packaging applications; superconducting films for ICs and packaging; reliability of VLSI metallization.