Photomask and X-Ray Mask Technology-Vi
Published on 1. January 1999
Book
Paperback/Softback
628 pages
978-0-8194-3230-8 (ISBN)
More details
Language
English
Place of publication
Bellingham
United States
Target group
College/higher education
Professional and scholarly
Illustrations
illustrations (some colour)
ISBN-13
978-0-8194-3230-8 (9780819432308)
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Schweitzer Classification