Introduction to Semiconductor Microtechnology

Written as a "first exposure" to semiconductor microtechnology, this classic text places emphasis on the principles of the topic. The text presents an introduction to the development of microtechnology; is concerned with the growth and preparation of semiconducting materials; discusses the process of doping and type-conversion, and the twin technologies of diffusion and ion implantation; deals with oxidation, the process of photolithography, metallization, interconnections, and bonding; considers the structure and processing of circuit components and integrated circuits; and speculates on future trends in semiconductor microtechnology. Fully revised and updated, this second edition is presented in a more reader- friendly style, including instructional objectives and self- evaluation questions, plus problems at the ends of chapters. No particular mathematics skills or specialist knowledge is needed to be able to use this text effectively.