
Characterization of Plasma-Enhanced CVD Processes: Volume 165
Materials Research Society (Publisher)
Published on 5. September 1990
Book
Hardback
270 pages
978-1-55899-053-1 (ISBN)
Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
More details
Series
Language
English
Place of publication
New York
United States
Target group
Professional and scholarly
Product notice
sewn/stitched
Cloth over boards
Illustrations
Worked examples or Exercises
Dimensions
Height: 231 mm
Width: 152 mm
Thickness: 23 mm
Weight
612 gr
ISBN-13
978-1-55899-053-1 (9781558990531)
Copyright in bibliographic data and cover images is held by Nielsen Book Services Limited or by the publishers or by their respective licensors: all rights reserved.
Schweitzer Classification
Persons
Editor
North Carolina State University
AT&T Bell Laboratories, New Jersey
University of California, Berkeley