Optical Microlithography XXII
Published on 1. January 2009
Book
Paperback/Softback
978-0-8194-7527-5 (ISBN)
More details
Series
Language
English
Place of publication
Bellingham
United States
Target group
Professional and scholarly
Illustrations
Illustrations (some col.)
ISBN-13
978-0-8194-7527-5 (9780819475275)
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Schweitzer Classification