Lithography Process Control
Published on 31. May 1999
Book
Paperback/Softback
194 pages
978-0-8194-3052-6 (ISBN)
Description
This tutorial text covers lithography process control at several levels, from fundamental through advanced topics. A basic familiarity with lithography science is assumed. The book is intended to be a self contained tutorial that works as an introduction to those entering the field, and as a reference for the experienced lithography engineer.
More details
Series
Language
English
Place of publication
Bellingham
United States
Target group
Professional and scholarly
Illustrations
Illustrations, 1 port.
Dimensions
Height: 254 mm
Width: 178 mm
Thickness: 15 mm
Weight
444 gr
ISBN-13
978-0-8194-3052-6 (9780819430526)
Copyright in bibliographic data and cover images is held by Nielsen Book Services Limited or by the publishers or by their respective licensors: all rights reserved.
Schweitzer Classification
Content
Introduction to the use of statistical process control in lithography; sampling; simple and complex processes; linewidth control; overlay; yield; process drift and automatic process control; metrology; control of operations.