Fundamentals of Microelectronics Processing
Published on 1. June 1990
Book
Hardback
532 pages
978-0-07-100796-2 (ISBN)
Description
This new text introduces the material of each process type by explaining the underlying chemical engineering (and physical) principles. For microelectronic processing courses the text progresses from an overview of microelectronics processing through a logically-sequenced discussion of the processes leading to integrated circuits. The author is very careful to define terms that may be unfamiliar to chemical engineers, to provide numerous examples to aid in their understanding, and to include ample end-of-chapter problems.
More details
Language
English
Place of publication
London
United Kingdom
Publishing group
McGraw-Hill Education - Europe
Target group
College/higher education
Professional and scholarly
Dimensions
Height: 230 mm
ISBN-13
978-0-07-100796-2 (9780071007962)
Copyright in bibliographic data is held by Nielsen Book Services Limited or its licensors: all rights reserved.
Schweitzer Classification
Content
Integrated Circuits and Fabrication. Silicon Refining and Other Raw Materials. Bulk Crystal Growth. Electrical Properties of Processes Materials. Chemical Rate Processes and Kinetics. Chemical Vapour Deposition Reactors. Incorporation and Transport of Dopants. Pattern Generation, Transfer, and Delineation. Physical and Physico-Chemical Rate Processes. Physical Vapour Deposition Apparatuses and Plasma Reactors. Packaging.