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Characterization and Modeling of Mainstream and Alternative Conditioning and Polishing Technologies in Inter-Layer Dielectric and Copper Chemical Mech

Hyo-Sang Lee(Author)
Proquest, Umi Dissertation Publishing
Published on 1. September 2011
Book
Paperback/Softback
270 pages
978-1-243-48922-7 (ISBN)
€83.48incl. 7% vat
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