Fundamental Principles of Engineering Nanometrology
Published on 16. November 2009
Book
Hardback
352 pages
978-0-08-096454-6 (ISBN)
Description
Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.
More details
Series
Language
English
Place of publication
Oxford
United Kingdom
Publishing group
Elsevier Science & Technology
Target group
College/higher education
Academic and industrial researchers in MNT; Industrial MNT quality control personnel; PhD students in MNT; Post and undergraduate students on MNT courses; materials researchers; Design, manufacturing and measurement engineers
Dimensions
Height: 235 mm
Width: 191 mm
Weight
880 gr
ISBN-13
978-0-08-096454-6 (9780080964546)
Copyright in bibliographic data and cover images is held by Nielsen Book Services Limited or by the publishers or by their respective licensors: all rights reserved.
Schweitzer Classification
Other editions
New editions
Richard Leach
Fundamental Principles of Engineering Nanometrology
Book
10/2018
2nd Edition
William Andrew Publishing
€136.40
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Richard Leach
Fundamental Principles of Engineering Nanometrology
Book
06/2014
2nd Edition
William Andrew Publishing
€166.50
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Additional editions
Richard Leach
Fundamental Principles of Engineering Nanometrology
E-Book
09/2009
William Andrew
€124.00
Available for download
Person
Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Industry & Innovati
Content
1. Introduction to metrology for micro- and nanotechnology
2. Some basics of measurement
3. Precision measurement instrumentation - some design principles
4. Length traceability using interferometry
5. Displacement measurement
6. Surface topography measurement instrumentation
7. Scanning probe and particle beam microscopy
8. Surface topography characterisation
9. Co-ordinate metrology
10. Mass and force measurement
References
Appendix A SI units of measurement and their realisation at NPL
Appendix B SI derived units
2. Some basics of measurement
3. Precision measurement instrumentation - some design principles
4. Length traceability using interferometry
5. Displacement measurement
6. Surface topography measurement instrumentation
7. Scanning probe and particle beam microscopy
8. Surface topography characterisation
9. Co-ordinate metrology
10. Mass and force measurement
References
Appendix A SI units of measurement and their realisation at NPL
Appendix B SI derived units