Handbook of Plasma Processing Technology
Fundamental, Etching, Deposition and Surface Interactions
William Andrew (Publisher)
Published on 14. January 1991
Book
Paperback/Softback
546 pages
978-1-4933-0335-9 (ISBN)
More details
Language
English
Product notice
Paperback (trade)
Unsewn / adhesive bound
ISBN-13
978-1-4933-0335-9 (9781493303359)
Copyright in bibliographic data is held by Nielsen Book Services Limited or its licensors: all rights reserved.
Schweitzer Classification
Persons
Author
IBM T J Watson Research Center New York