
Integrated Circuit Fabrication
CRC Press
1st Edition
Published on 29. April 2021
Book
Hardback
336 pages
978-1-032-01429-6 (ISBN)
Description
This book covers theoretical and practical aspects of all major steps in the fabrication sequence. This book can be used conveniently in a semester length course on integrated circuit fabrication. This text can also serve as a reference for practicing engineer and scientist in the semiconductor industry. IC Fabrication are ever demanding of technology in rapidly growing industry growth opportunities are numerous. A recent survey shows that integrated circuit currently outnumber humans in UK, USA, India and China. The spectacular advances in the development and application of integrated circuit technology have led to the emergence of microelectronic process engineering as an independent discipline. Integrated circuit fabrication text books typically divide the fabrication sequence into a number of unit processes that are repeated to form the integrated circuit. The effect is to give the book an analysis flavor: a number of loosely related topics each with its own background material.
Note: T& F does not sell or distribute the Hardback in India, Pakistan, Nepal, Bhutan, Bangladesh and Sri Lanka.
Note: T& F does not sell or distribute the Hardback in India, Pakistan, Nepal, Bhutan, Bangladesh and Sri Lanka.
More details
Language
English
Place of publication
London
United Kingdom
Publishing group
Taylor & Francis Ltd
Target group
College/higher education
Illustrations
217 s/w Abbildungen, 34 s/w Tabellen
34 Tables, black and white; 217 Illustrations, black and white
Dimensions
Height: 234 mm
Width: 156 mm
Weight
810 gr
ISBN-13
978-1-032-01429-6 (9781032014296)
Copyright in bibliographic data and cover images is held by Nielsen Book Services Limited or by the publishers or by their respective licensors: all rights reserved.
Schweitzer Classification
Other editions
Additional editions

Shubham Kumar | Ankaj Gupta
Integrated Circuit Fabrication
E-Book
04/2021
1st Edition
CRC Press
€73.99
Available for download

Shubham Kumar | Ankaj Gupta
Integrated Circuit Fabrication
E-Book
04/2021
1st Edition
CRC Press
€73.99
Available for download
Persons
Kumar Shubham, Delhi Technical Campus, Uttar Pradesh, India
Ankaj Gupta, Delhi Technical Campus, Uttar Pradesh, India
Ankaj Gupta, Delhi Technical Campus, Uttar Pradesh, India
Content
1. Introduction to Silicon Wafer Processing 2. Epitaxy 3. Oxidation 4. Lithography 5. Etching 6. Diffusion 7. Ion Implantation 8. Film Deposition: Dielectric, Polysilicon and Metallization 9. Packaging 10. VLSI Process Integration