Coherent Optical Metrology

This volume provides a topical and comprehensive survey on methods and tools for optical metrology and illustrates their areas of application. As manufacturing technologies and producion processes improve, so does the need for powerful measurement and testing tools. Optical metrology meets this demand by offering high accuracy and resolution, fast data acquisition, high information density and more flexibility In this handbook, the authors address the experimental details and practical applications of optical metrology, with information on materials, optical and mechanical components and evaluation methods.