Handbook of Semiconductor Wafer Cleaning Technology
Science, Technology and Applications
Published on 31. December 1993
Book
Hardback
645 pages
978-0-8155-1331-5 (ISBN)
Description
This book brings together into one volume all pertinent knowledge on semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. The book provides the first comprehensive and up-to-date co
More details
Language
English
Place of publication
Norwich
United States
Target group
Professional and scholarly
Dimensions
Height: 229 mm
Width: 151 mm
Weight
450 gr
ISBN-13
978-0-8155-1331-5 (9780815513315)
Copyright in bibliographic data is held by Nielsen Book Services Limited or its licensors: all rights reserved.
Schweitzer Classification
Other editions
New editions
Karen Reinhardt | Werner Kern
Handbook of Silicon Wafer Cleaning Technology
Book
03/2008
2nd Edition
William Andrew Publishing
€319.93
Shipment within 15-20 days
Person
Content
Overview and Evolution of Semiconductor Wafer Contamination and Cleaning TechnologyTrace Chemical Contamination on Silicon SurfacesAqueous Cleaning ProcessesParticle Deposition and AdhesionOverview of Dry Wafer Cleaning ProcessesU