Materials Science and Technology
A Comprehensive Treatment / Processing of Semiconductors Cahn, R. W.(ed.) /Haasen, P. (ed.) /Kramer, E. J.(ed.)
1st Edition
Published on 14. November 1996
Book
Hardback
704 pages
978-3-527-26829-0 (ISBN)
Description
Dieses umfassende Handbuch bietet einen einzigartigen Überblick über die in der Elektronikindustrie eingesetzten Materialien und Technologien. Führende internationale Wissenschaftler haben zu diesem Band beigetragen und es zu einem unentbehrlichen Werk gemacht.
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More details
Series
Edition
1., Aufl.
Language
English
Place of publication
Weinheim
Germany
Target group
College/higher education
Professional and scholarly
Illustrations
47
415 s/w Abbildungen, 47 s/w Tabellen
500 b&w figures, 80 tables
Dimensions
Height: 24 cm
Width: 17 cm
Weight
1427 gr
ISBN-13
978-3-527-26829-0 (9783527268290)
Schweitzer Classification
Content
Silicon Processing (J. Wilkes); Compound Semiconductor Processing (J. Mullin); Epitaxial Growth (T. Kuech & M. Tischler); Photolithography (R. Leuschner & G. Pawlowski); Selective Doping (S. Mahajan); Etching Processes in Semiconductor Manufacturing (K. Donohoe, et al.); Silicon Device Structures (C.-Y. Chang & S. Sze); Compound Semiconductor Device Structures (W. Stanchina & J. Lam); Silicon Device Processing (D.-L. Kwong); Compound Semiconductor Device Processing (J. Parsey); Integrated Circuit Packaging (D. Amey); Interconnection Systems (W. Knausenberger); Index.