Handbook of Semiconductor Technology
2 Volume Set / Processing of Semiconductors
Published on 3. November 2000
Book
XII, 703 pages
978-3-527-29835-8 (ISBN)
Description
An in-depth reference work in two volumes on the basic materials for the microelectronics industry. It covers both fundamental research and technological aspects in an area of modern technology where basic science (quantum physics) is of crucial importance for the development of new devices (ULSI technology). Volume 2 deals with the enabling materials technology for the electronics industry.
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Content
Volume 2: silicon processing; compound semiconductors processing; epitaxial growth; photolitography; doping; etching processes in semiconductor manufacturing; silicon device structures; compound semiconductor device structures; silicon device processing; compound semiconductor device processing; integrated circuit packaging; interconnect systems.