Advances in Resist Technology and Processing VIII
H. Ito(Author)
SPIE-International Society for Optical Engineering (Publisher)
Published on 1. July 1991
Book
Hardback
679 pages
978-0-8194-0565-4 (ISBN)
More details
Series
Language
English
Place of publication
United States
Product notice
sewn/stitched
Cloth over boards
Illustrations
illustrations
ISBN-13
978-0-8194-0565-4 (9780819405654)
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Schweitzer Classification