Handbook of Vacuum Science and Technology
Published on 13. October 1997
Book
Hardback
835 pages
978-0-12-352065-4 (ISBN)
Description
"The Handbook of Vacuum Technology" consists of the latest innovations in vacuum science and technology with a strong orientation towards the vacuum practitioner. It covers many of the new vacuum pumps, materials, equipment, and applications. It also details the design and maintenance of modern vacuum systems. The authors are well known experts in their individual fields with the emphasis on performance, limitations, and applications rather than theory. There are many useful tables, charts, and figures that will be of use to the practitioner. Key features include: user oriented with many useful tables, charts, and figures of use to the practitioner; reviews new vacuum materials and equipment; illustrates the design and maintenance of modern vacuum systems; and includes well referenced chapters.
More details
Language
English
Place of publication
San Diego
United States
Publishing group
Elsevier Science Publishing Co Inc
Target group
Professional and scholarly
Illustrations
b&w illustrations, tables, charts, figures
Dimensions
Height: 229 mm
Width: 152 mm
Weight
1325 gr
ISBN-13
978-0-12-352065-4 (9780123520654)
Copyright in bibliographic data and cover images is held by Nielsen Book Services Limited or by the publishers or by their respective licensors: all rights reserved.
Schweitzer Classification
Other editions
Additional editions
Dorothy Hoffman | Bawa Singh | John H. Thomas III
Handbook of Vacuum Science and Technology
E-Book
10/1997
Academic Press
€220.00
Available for download
Content
Preface. Fundamentals of Vacuum Technology and Surface Physics: B. Singh and J.H. Thomas, III, Vacuum Nomenclature and Definitions. Gas Properties. Molecular Processes and Kinetic Theory. Throughput, Pumping Speed, Evacuation Rate, Outgassing Rate, and Leak Rate. Gas Flow. Conductance. Flow Calculations. Surface Physics and Its Relation to Vacuum Science. Creation of Vacuum: M. Hablanian, The Technology of Vacuum Pumps--An Overview. F.J. Eckle, Diaphragm Pumps. J. Richman, Blowers. Vapor Jet Pumps: M. Hablanian, Diffusion Pumps. G. Ash, Cryogenic Pumps. H. Henning, Turbomolecular Pumps. J. Singleton, UHV Pumps. Vacuum Measurements: H.M. Brady, R.H. Goehner, E. Drubetsky, and W.H. Bayles, Jr., Measurements of Pressure. L. Lieszkovszky, Mass Analysis and Partial Pressure Measurement. R. Outlaw, Analysis of Partial Pressure Information. L. Hinkle, Gas Flow Measurements. Systems Design and Components: Components for Vacuum Equipment and Systems: N.T. Peacock, Valves. N.T. Peacock, Flanges. W. Helgeland, Feedthroughs. C. Kraft, Ports. J. Panitz, Construction Materials: Properties Defining Material Performance. Vacuum Chamber Materials. Special Purpose Materials. R.N. Peacock, Seal Materials and Design. B. Dayton, Outgassing of Materials. J. Garner, Aluminum Based Vacuum Systems. D. Mattox, Preparation and Cleaning of Vacuum Surfaces. Vacuum Applications: High Vacuum Based Processes: S. Rossnagel, Sputtering. V. Patel, Plasma Etching. M. Powers, Ion Beam Based Processes. J. Cheung, Laser Ablation. F. Jansen, CVD and PECVD. J. Thomas, UHV Based Processes. Large-Scale Vacuum Based Processes: W. Robbins, Large Area Coatings. H.F. Dylla, The Development of Ultrahigh Vacuum Technology for Particle Accelerators and Magnetic Fusion Devices.