Nanoscale Materials Processing

This book reviews the synthesis, deposition, use and characterisation of materials when processed at the nanoscale level. Specific articles cover cleanroom construction, wet etching, dry etching, optical and e-beam lithography, ion implantation, evaporation, front-end, back-end, sputter deposition, and thermal processing methodologies and technologies. Theoretical and practical considerations are explored in depth. Functional emphasis is placed on emergent materials such as carbon nanotubes, fullerenes, diamond like carbon and luminescent organic materials. Extensive case studies complement each article, enabling real world application. Technology, process and application lens aids solution of real-world problems Supplemented with case studies from microfabrication industry, supporting conclusions well beyond the microscope. Each article highlights best practice for labwork and cleanroom development, sustaining total quality standards across the plant for multiple processing types.