Integrated Micromotion Systems
Micromachining, Control and Applications
Published in September 1990
Book
Hardback
474 pages
978-0-444-88417-6 (ISBN)
Description
Over the past thousand years civilization has concentrated on the development of tools and devices of human size or larger. In this new discipline of Integrated Micro-Motion Systems, the miniaturization of mechanical devices and systems is intensively studied down to the size of micron meters as small as biological cells. Recently, electronics technology has been developing on the basis of semiconductor micro-devices, so-called LSI circuits of which the critical dimensions are measured in sub-microns. The influence of LSI circuits are obvious, and they have had a great impact on civilization. The capability of LSI circuits however is predominately in signal processing. Today, micro systems technology which incorporates mechanical motion with signal processing is developing rapidly by using the same fabrication processes as LSI circuits. The goal of this particular field is to develop an integrated micro motion system which is composed of micro mechanical components, actuators, sensors and logic circuits, namely, an autonomous micro robot.
Over the past thousand years civilization has concentrated on the development of tools and devices of human size or larger. In this new discipline of Integrated Micro-Motion Systems, the miniaturization of mechanical devices and systems is intensively studied down to the size of micron meters as small as biological cells. Recently, electronics technology has been developing on the basis of semiconductor micro-devices, so-called LSI circuits of which the critical dimensions are measured in sub-microns. The influence of LSI circuits are obvious, and they have had a great impact on civilization. The capability of LSI circuits however is predominately in signal processing. Today, micro systems technology which incorporates mechanical motion with signal processing is developing rapidly by using the same fabrication processes as LSI circuits. The goal of this particular field is to develop an integrated micro motion system which is composed of micro mechanical components, actuators, sensors and logic circuits, namely, an autonomous micro robot.
Over the past thousand years civilization has concentrated on the development of tools and devices of human size or larger. In this new discipline of Integrated Micro-Motion Systems, the miniaturization of mechanical devices and systems is intensively studied down to the size of micron meters as small as biological cells. Recently, electronics technology has been developing on the basis of semiconductor micro-devices, so-called LSI circuits of which the critical dimensions are measured in sub-microns. The influence of LSI circuits are obvious, and they have had a great impact on civilization. The capability of LSI circuits however is predominately in signal processing. Today, micro systems technology which incorporates mechanical motion with signal processing is developing rapidly by using the same fabrication processes as LSI circuits. The goal of this particular field is to develop an integrated micro motion system which is composed of micro mechanical components, actuators, sensors and logic circuits, namely, an autonomous micro robot.
More details
Language
English
Place of publication
Oxford
United Kingdom
Publishing group
Elsevier Science & Technology
Target group
College/higher education
Professional and scholarly
Dimensions
Height: 230 mm
ISBN-13
978-0-444-88417-6 (9780444884176)
Copyright in bibliographic data is held by Nielsen Book Services Limited or its licensors: all rights reserved.
Schweitzer Classification
Content
Micromechanical systems (W. Trimmer). Innovative silicon sensors for radiant, mechanical, thermal, magnetic and chemical signals (S. Middelhoek). The mechanism of electrochemical and anisotropic silicon etching and its applications (H. Seidel). Submillimeter-sized pressure sensors - design, fabrication, applications (B. Hok). Mechanical properties of microelectronic materials: The impact on microstructure design and fabrication (S.D. Senturia). Micromachining: of course silicon, but also other materials (G. Delapierre). Intelligent materials for the sensors (K. Takahashi). Si/-Al 2 O 3 /Si as sensor material (T. Nakamura, M. Ishida). Initial thoughts on the dynamics and control of electric micromotors (J.H. Lang). Network motion control in micromechatronics (T. Murakami et al.). Microsensors and its applications (I. Igarashi). Custom signal processing for mechanical sensor systems (W. Sansen et al.). An intelligent adaptive sensing system (H. Yamasaki, K. Takahashi). Micro actuators for micro motion systems (H. Fujita). Fabrication technologies for integrated microdynamic systems (W. Yun et al.). Microdynamics (R.S. Muller). Field-based state sensing in micro motion systems (C. Jacobsen et al.). Integrated micro flow control systems (M. Esashi). Micro robots and micro mechanisms using shape memory alloy (D. Homma et al.). Construction and performance characteristics of polysilicon resonating beam force transducers (H. Guckel et al.). Applications of micromachine systems in medicine (Y. Nose et al.). Electrostatic manipulation of biological objects in microfabricated structures (M. Washizu). Applications of micromachined sensors (N.F. de Rooij).