Gate Dielectric Integrity: Material, Process and Tool Qualification
Material, Process and Tool Qualification
Published on 1. January 2000
Book
Paperback/Softback
176 pages
978-0-8031-2615-2 (ISBN)
More details
Language
English
Place of publication
West Consohocken
United States
Target group
College/higher education
Professional and scholarly
Dimensions
Height: 222 mm
Width: 152 mm
Thickness: 13 mm
Weight
272 gr
ISBN-13
978-0-8031-2615-2 (9780803126152)
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Schweitzer Classification