Design and Characterization of a High Brightness Neutral Particle Source for Proximity Lithography
Published on 1. September 2011
Book
Paperback/Softback
84 pages
978-1-243-80277-4 (ISBN)
More details
Language
English
Place of publication
United States
Product notice
Paperback (trade)
Unsewn / adhesive bound
Illustrations
black & white illustrations
Dimensions
Height: 246 mm
Width: 189 mm
Thickness: 4 mm
Weight
168 gr
ISBN-13
978-1-243-80277-4 (9781243802774)
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Schweitzer Classification