Surface Scattering and Diffraction for Advanced Metrology
Published on 28. February 2002
Book
Paperback/Softback
172 pages
978-0-8194-4161-4 (ISBN)
More details
Series
Edition
New ed.
Language
English
Place of publication
Bellingham
United States
Target group
Professional and scholarly
ISBN-13
978-0-8194-4161-4 (9780819441614)
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Schweitzer Classification