Analysis of Microelectronic Materials and Devices
Published on 24. September 1991
Book
Hardback
980 pages
978-0-471-91713-7 (ISBN)
Description
Presents a comprehensive survey of analytical techniques currently used in support of all stages of microelectronic materials and device processing. The diversity of topics covered has been achieved by bringing together an international field of authors contributing specialized chapters.
More details
Language
English
Place of publication
Chichester
United Kingdom
Publishing group
John Wiley and Sons Ltd
Target group
College/higher education
Professional and scholarly
Illustrations
index
Dimensions
Height: 235 mm
Width: 156 mm
Weight
1680 gr
ISBN-13
978-0-471-91713-7 (9780471917137)
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Schweitzer Classification