Handbook of Thin Film Process Technology, Second Edition

Since the publication of the first edition of the Handbook of Thin Film Process Technology, a number of key developments in this area have emerged, necessitating a second edition of this standard reference. The second edition includes new sections that cover the technologies developed since 1995, such as organic thin films for microelectronics; new chapters that detail new or improved techniques, including focused ion beam processing and patterning of MEMS; and revisions of existing chapters to improve the original material, remove redundant techniques, and reflect developments in the field. The book comprehensively covers thin film materials, deposition and processing techniques, characterization methods, and applications.