Microsensors

The reduction in the size of a sensor can lead to increased applicability through lower weight and cost manufacture and improved marketability; hence the increasing importance of the microsensor. These superior sensors can be employed in a wide range of measuring instruments that have a variety of uses in cars, consumer electronics, space and the nuclear industry Devoted primarily to the uses of microsensors, this text covers thermal, radiation, mechanical, magnetic, chemical and biological microsensors. In addition, useful information is provided on basic processing, interfacing, and bus systems; the processing of materials for microsensor fabrications; and microsensor arrays and intelligent sensors