Materials and Device Characterization In Micromachining
Published on 1. January 1998
Book
Paperback/Softback
454 pages
978-0-8194-2971-1 (ISBN)
Description
This work contains papers on materials and device characterization in micromachining. Subjects covered include the characterization by scanning probe microscopy and materials characterization such as the tensile properties of LIGA nickel.
More details
Language
English
Place of publication
Bellingham
United States
Target group
Professional and scholarly
Illustrations
index
ISBN-13
978-0-8194-2971-1 (9780819429711)
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Schweitzer Classification