RF Power for Industrial Applications

For 2 to 4 semester-hour courses in RF Power in the Electronics/Computer Technology departments; can also be used for industry courses in RF Power.

This text, the only one of its kind on the market, focuses on RF (radio frequency) power for use in industrial applications, where semiconductor manufacturing equipment generates a plasma for processing wafers. The emphasis is on equipment and circuits related to RF power in manufacturing equipment tools such as etchers and chemical vapor deposition, among others. This is a useful book that provides a base upon which a student can pursue more equipment-specific knowledge.