Microlithography
Process Technology for Integrated Circuit Fabrication
Published on 1. January 1986
Book
Hardback
378 pages
978-0-07-019304-8 (ISBN)
More details
Language
English
Place of publication
New York
United States
Publishing group
McGraw-Hill Education - Europe
Target group
College/higher education
Illustrations
Ill.
Dimensions
Height: 241 mm
Width: 155 mm
Weight
680 gr
ISBN-13
978-0-07-019304-8 (9780070193048)
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Schweitzer Classification