Laser and Particle-Beam Chemical Processing for Microelectronics: Volume 101
Published on 5. June 2014
Book
Paperback/Softback
534 pages
978-1-107-41104-3 (ISBN)
Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
More details
Series
Language
English
Place of publication
Cambridge
United Kingdom
Target group
College/higher education
Professional and scholarly
Product notice
Paperback (trade)
Dimensions
Height: 229 mm
Width: 152 mm
Thickness: 27 mm
Weight
710 gr
ISBN-13
978-1-107-41104-3 (9781107411043)
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Schweitzer Classification