Laser and Particle-Beam Chemical Processing for Microelectronics: Volume 101
Published on 1. April 1988
Book
Hardback
536 pages
978-0-931837-69-2 (ISBN)
Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
More details
Series
Language
English
Place of publication
New York
United States
Target group
Professional and scholarly
Product notice
sewn/stitched
Cloth over boards
Illustrations
Worked examples or Exercises
Dimensions
Height: 234 mm
Width: 160 mm
Thickness: 38 mm
Weight
1021 gr
ISBN-13
978-0-931837-69-2 (9780931837692)
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Schweitzer Classification