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Closed-Loop Control of III-V Semiconductor Growth by Combined Spectroscopic Ellipsometry and Reflectgance-Difference Spectroscopy

Martin Ebert(Author)
Wissenschaft & Technik (Publisher)
Published in 2001
Book
Paperback/Softback
112 pages
978-3-89685-368-4 (ISBN)
€34.00incl. 7% vat
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