Closed-Loop Control of III-V Semiconductor Growth by Combined Spectroscopic Ellipsometry and Reflectgance-Difference Spectroscopy
Martin Ebert(Author)
Wissenschaft & Technik (Publisher)
Published in 2001
Book
Paperback/Softback
112 pages
978-3-89685-368-4 (ISBN)
More details
Language
English
Dimensions
Height: 21 cm
Width: 15 cm
Weight
140 gr
ISBN-13
978-3-89685-368-4 (9783896853684)
Schweitzer Classification